


High Precision Linear Motor Stage Direct Drive Linear Motor Actuator for Industrial Automation
- High precision linear motor with ±0.1μm accuracy, high speed & acceleration, fast dynamic response. Ideal for wafer dicing, optical processing, automotive & 3C automation.
- High Precision Linear Motor Stage
- Direct Drive Linear Slide Table
- High Speed Linear Motor Actuator
Direct Drive Linear Motor delivers exceptional precision, speed, and reliability for a wide range of demanding applications. Designed for ultra-precision machining, high-speed production lines, and specialized operating conditions, this linear motor excels in environments where accuracy and dynamic response are critical
Ultra-Precision Accuracy: Ideal for tasks requiring micrometer-level precision (±0.1μm).
High-Speed Operation: Supports fast cycle times and rapid part handling, boosting productivity.
Dynamic Response: High acceleration and deceleration capabilities for fast, reliable motion.
Versatility: Works seamlessly in vacuum, semiconductor, and long-travel applications.
Minimal Maintenance: Robust design ensures reliability and reduces downtime.
- Application: Semiconductor, Automotive, 3C and Optical equipment.

